{"id":2789,"date":"2023-07-13T23:44:44","date_gmt":"2023-07-13T15:44:44","guid":{"rendered":"https:\/\/nyyjtx.cn\/?p=2789"},"modified":"2023-07-13T23:44:44","modified_gmt":"2023-07-13T15:44:44","slug":"%e7%a0%94%e7%a9%b6-%e5%8d%b0%e5%ba%a6%e5%94%af%e4%b8%80%e7%9a%84%e6%99%b6%e5%9c%86%e5%8e%82%ef%bc%8c%e4%bb%80%e4%b9%88%e6%b0%b4%e5%b9%b3%ef%bc%9f","status":"publish","type":"post","link":"https:\/\/nyyjtx.cn\/?p=2789","title":{"rendered":"\u7814\u7a76 | \u5370\u5ea6\u552f\u4e00\u7684\u6676\u5706\u5382\uff0c\u4ec0\u4e48\u6c34\u5e73\uff1f"},"content":{"rendered":"
\n
\u4f5c\u8005\uff1a<\/strong>\u624b\u673a\u6280\u672f\u8d44\u8baf
\u6765\u6e90\uff1a<\/strong>\u5357\u4e9a\u7814\u7a76\u901a\u8baf
\u539f\u6587\uff1a<\/strong>\u5fae\u4fe1\u516c\u4f17\u53f7\u539f\u6587<\/a>
\u672c\u6587\u51714365\u5b57\u9605\u8bfb\u9884\u8ba111\u5206\u949f<\/div>\n

\u7f16\u8f91 | \u5218\u6d3e \u7a46\u794e\u74a0 \u56fe\u6e90\uff1a\u7f51\u7edc \u5370\u5ea6\u4e8e 2021 \u5e74\u5e95\u5ba3\u5e03\u4e86\u4e00\u4e2a\u534a\u5bfc\u4f53\u521d\u59cb\u6fc0\u52b1\u65b9\u6848\u2014\u2014\u4e00\u4e2a\u8fd1 100 \u4ebf\u7f8e\u5143\u7684\u65b0\u534a\u5bfc\u4f53\u8ba1\u5212\u3002\u5230\u4eca\u5e74 2 \u6708\u4e2d\u65ec\uff0c\u8be5\u8ba1\u5212\u6536\u5230\u4e86\u4e09\u9879\u5173\u4e8e\u5efa\u8bbe\u65b0\u7684\u5546\u4e1a\u7845 CMOS \u534a\u5bfc\u4f53\u5de5\u5382\uff08\u82af\u7247\u5236\u9020\u5355\u4f4d\uff09\u7684\u63d0\u6848\uff1b\u8fd9\u4e09\u4e2a\u4eba\u90fd\u5728\u7b49\u5f85\u4e2d\u592e\u653f\u5e9c\u7684\u201c\u662f\/\u5426\u201d\u51b3\u5b9a\u3002\u6839\u636eAshwini Vaishnaw\u90e8\u957f\u6700\u8fd1\u7684\u58f0\u660e\uff0c\u653f\u5e9c\u6b63\u5904\u4e8e\u201c\u5bf9\u7533\u8bf7\u8fdb\u884c\u8bc4\u4f30\u7684\u9ad8\u7ea7\u9636\u6bb5\u201d\uff0c\u201c\u6211\u4eec\u5e94\u8be5\u5728\u4eca\u5e74\u7b7e\u7f72\u7b2c\u4e00\u4efd\u534f\u8bae\u201d\u3002\u65e0\u8bba\u54ea\u4e2a\u7533\u8bf7\u4eba\u83b7\u5f97\u6279\u51c6\uff0c\u4ed6\u4eec\u5728\u5370\u5ea6\u7684\u65b0\u5de5\u5382\u5728 2026-27 \u5e74\u4e4b\u524d\u5b9e\u73b0\u5927\u6279\u91cf\u751f\u4ea7\u7684\u673a\u4f1a\u90fd\u975e\u5e38\u5c0f\u3002<\/p>\n

\u4e0e\u6b64\u540c\u65f6\uff0c\u503c\u5f97\u4ed4\u7ec6\u7814\u7a76\u5370\u5ea6\u73b0\u6709\u7684\u8bbe\u65bd\u548c\u751f\u6001\u7cfb\u7edf\uff0c\u4ee5\u6700\u5927\u9650\u5ea6\u5730\u63d0\u9ad8\u5176\u751f\u4ea7\u529b\u548c\u5bf9\u8fd1\u671f\u7684\u5f71\u54cd\u3002\u5728\u672c\u6587\u4e2d\uff0c\u6211\u4eec\u5c06\u5c06\u7740\u773c\u4e8e\u4ecb\u7ecd\u534a\u5bfc\u4f53\u5b9e\u9a8c\u5ba4 (Semi-Conductor Lab\uff1aSCL)\uff0c\u8fd9\u662f\u5370\u5ea6\u7b2c\u4e00\u5bb6\u4e5f\u662f\u76ee\u524d\u552f\u4e00\u4e00\u5bb6\u62e5\u6709\u5b8c\u6574\u7684\u5de5\u4e1a\u7ea7\u8bbe\u5907\u548c\u57fa\u7840\u8bbe\u65bd\u751f\u4ea7\u7ebf\u7684\u534a\u5bfc\u4f53\u82af\u7247\u5de5\u5382\u3002<\/p>\n

\u4e00\u3001SCL Mohali \u7b80\u53f2\u5f15\u75282000 \u5e74\u53d1\u5e03\u7684EETimes\u7684<\/h2>\n

\u8fd9\u4efd\u62a5\u544a\uff0cSCL \u6700\u521d\u4ee3\u8868\u201cSemiconductor Complex Limited\u201d\uff0c\u662f\u5370\u5ea6\u7684\u516c\u5171\u90e8\u95e8\u4f01\u4e1a (PSU)\u3002\u201cSCL \u4e8e 1983 \u5e74\u5f00\u59cb\u751f\u4ea7\u2026\u20261989 \u5e74\u4e00\u573a\u795e\u79d8\u7684\u706b\u707e\u5c06\u5de5\u5382\u70e7\u6bc1\uff0c\u76f4\u5230 1997 \u5e74\u3002\u8d77\u706b\u539f\u56e0\u5c1a\u4e0d\u6e05\u695a\uff0c\u4f46\u6709\u7eb5\u706b\u5acc\u7591\uff0c\u56e0\u4e3a\u5f53\u65f6 SCL \u6b63\u5728\u4e3a\u519b\u65b9\u8bbe\u8ba1\u548c\u5f00\u53d1 VLSI \u6280\u672f\u3002\u201d\u76f8\u5173\u62a5\u544a\u8bf4\u3002\u66f4\u6709\u8da3\u7684\u662f\u201cSCL 1999-2000 \u5e74\u7684\u6536\u5165\u7ea6\u4e3a 1400 \u4e07\u7f8e\u5143\uff0c\u5229\u6da6\u7ea6\u4e3a 40 \u4e07\u7f8e\u5143\u201d\u3002\u5982\u679c\u8fd9\u662f\u771f\u7684\uff0c\u90a3\u4e48\u5c3d\u7ba1\u53d1\u751f\u706b\u707e\uff0c\u5370\u5ea6\u5728 2000 \u5e74\u8fd8\u662f\u6709\u4e00\u4e2a\u76c8\u5229\u7684\u6676\u5706\u5382\u3002<\/p>\n

\u672c\u6587\u4f5c\u8005\u63d0\u5230\u7684\u4e0b\u4e00\u4efd\u6587\u4ef6\u603b\u7ed3\u4e86 2005 \u5e74\u7684\u60c5\u51b5\u2014\u2014 \u201c\u8fc7\u53bb SCL \u516c\u53f8\u622a\u81f3 2005 \u5e74 3 \u6708 31 \u65e5\u7d2f\u8ba1\u4e8f\u635f 132.39 \u5343\u4e07\u5362\u6bd4\uff0c\u8d85\u8fc7\u5176\u51c0\u8d44\u4ea7\u7684 50%\uff0c\u56e0\u6b64\uff0c\u4f7f\u516c\u53f8\u4e00\u4e2a\u53ef\u80fd\u751f\u75c5\u7684\u5355\u4f4d\u3002\u7136\u800c\uff0c\u5370\u5ea6\u653f\u5e9c\u8003\u8651\u5230\u4e0e\u5fae\u7535\u5b50\u6709\u5173\u7684\u6d3b\u52a8\u548c\u5458\u5de5\u7684\u5229\u76ca\uff0c\u51b3\u5b9a\u4e0d\u64a4\u8d44\u6216\u51fa\u552e SCL \u516c\u53f8\u3002\u592a\u7a7a\u90e8 (DOS) \u5c06 SCL \u516c\u53f8\u91cd\u7ec4\u4e3aSemi-Conductor Laboratory Society (SCL Society)\u3002<\/p>\n

\u4ece 2005 \u5e74 6 \u6708\u5230 2022 \u5e74\uff0cSCL \u4e00\u76f4\u662f ISRO \u65d7\u4e0b\u7684\u201c\u534a\u5bfc\u4f53\u5b9e\u9a8c\u5ba4\u201d\uff08Semi-Conductor Laboratory\uff09\uff0c\u6839\u636e\u672c\u65b0\u95fb\u7a3f\uff0c\u201cSCL Mohali \u4e5f\u5df2\u4ece\u592a\u7a7a\u90e8\u79fb\u4ea4\u7ed9 MeitY\uff0c\u5b83\u6b63\u5728\u4f5c\u4e3a\u5546\u4e1a\u6676\u5706\u5382\u5f00\u653e\uff0c\u4ee5\u4f9b\u66f4\u5e7f\u6cdb\u7684\u53c2\u4e0e\u5370\u5ea6\u534a\u5bfc\u4f53\u8bbe\u8ba1\u516c\u53f8\u4f7f\u7528\u201d\u3002\u5c06 SCL \u4f5c\u4e3a\u5546\u4e1a\u6676\u5706\u5382\u5f00\u653e\u662f\u4e00\u4e2a\u53d7\u6b22\u8fce\u7684\u4e3e\u63aa\u3002\u6b64\u5916\uff0c\u653f\u5e9c\u8fd8\u5e94\u91cd\u65b0\u5ba1\u89c6SCL\u4f5c\u4e3a\u201c'society\u201d\u7684\u6ce8\u518c\u6a21\u5f0f\uff0c\u4ee5\u53ca\u968f\u4e4b\u6dfb\u52a0\u7684\u201c\u5b9e\u9a8c\u5ba4\u201d\u3002<\/p>\n

\u4e8c\u3001SCL \u7684\u5173\u952e\u6280\u672f\u76ee\u524d\uff0c<\/h2>\n

\u6839\u636e SCL \u7f51\u7ad9\uff0c\u4ed6\u4eec\u6709\u4e00\u6761\u7528\u4e8e\u5fae\u673a\u7535\u7cfb\u7edf ( MEMS )\u7684 6 \u82f1\u5bf8 (150 \u6beb\u7c73) \u6676\u5706\u5c3a\u5bf8\u751f\u4ea7\u7ebf\u548c\u4e00\u6761\u7528\u4e8eCMOS\u7684\u5177\u6709 180 \u7eb3\u7c73 (0.18 \u5fae\u7c73) \u5de5\u827a\u8282\u70b9\u7684 8 \u82f1\u5bf8 (200 \u6beb\u7c73) \u751f\u4ea7\u7ebf\uff0c\u540e\u8005\u4f3c\u4e4e\u662f\u5728 2010-11 \u5e74\u5de6\u53f3\u6dfb\u52a0\u7684\u3002\u4e00\u4efd 2010 \u5e74\u7684\u62db\u6807\u79f0\uff0c\u201c SAS Nagar \u7684\u534a\u5bfc\u4f53\u5b9e\u9a8c\u5ba4 (SCL) \u6b63\u5728\u8fd0\u8425\u4e00\u4e2a 6\u201d \u6676\u5706\u5382\uff0c\u4ea7\u80fd\u4e3a 2000 wpm\uff0c\u91c7\u7528 1.2 \u5fae\u7c73\/0.8 \u5fae\u7c73 CMOS \u6280\u672f\u3002SCL \u8ba1\u5212\u5c06\u5176\u6676\u5706\u5236\u9020\u8bbe\u65bd\u5347\u7ea7\u4e3a 8 \u82f1\u5bf8\u6676\u57060.18 \u5fae\u7c73\u6280\u672f\u8282\u70b9\u7684\u6676\u5706\u5382\u3002<\/p>\n

\u73b0\u6709\u7684\u516c\u7528\u4e8b\u4e1a\uff0c\u5982\u8d85\u7eaf\u6c34 (UPW) \u5904\u7406\u5382\u548c\u6c61\u6c34\u5904\u7406\u5382 (ETP) \u5c06\u9700\u8981\u76f8\u5e94\u7684\u589e\u5f3a\/\u6269\u5c55\u4ee5\u652f\u6301 0.18 \u5fae\u7c73\u5de5\u827a\u201d\u3002\u6709\u8da3\u7684\u662f\uff0c\u62db\u6807\u8be6\u7ec6\u4ecb\u7ecd\u4e86 UPW \u548c ETP \u7cfb\u7edf\u7684\u8981\u6c42\u3002\u4efb\u4f55\u8bfb\u8fc7\u5b83\u7684\u4eba\u90fd\u4f1a\u6beb\u4e0d\u6000\u7591\uff0c\u5370\u5ea6\u5bf9\u201c\u5728\u5370\u5ea6\u8fd0\u8425\u6676\u5706\u5382\u6240\u9700\u7684\u751f\u6001\u7cfb\u7edf\u3001\u57fa\u7840\u8bbe\u65bd\u548c\u4e13\u4e1a\u77e5\u8bc6\u201d\u5e76\u4e0d\u964c\u751f\u3002\u6709\u5173\u6dfb\u52a0\u5177\u6709 0.18 \u5fae\u7c73 (180nm) \u6280\u672f\u8282\u70b9\u7684 8 \u82f1\u5bf8 (200mm) \u6676\u5706\u5382\u751f\u4ea7\u7ebf\u7684\u8be6\u7ec6\u4fe1\u606f\u5c1a\u672a\u5b8c\u5168\u516c\u5f00\u3002\u7136\u800c\uff0c\u81f3\u5c11\u6709\u4e24\u7bc7\u516c\u5171\u9886\u57df\u7684\u671f\u520a\u8bba\u6587\u6697\u793a\uff0c\u4ee5\u8272\u5217\u7684 Tower Semiconductors \u662f\u5728\u8fd9\u65b9\u9762\u5e2e\u52a9 SCL \u7684\u884c\u4e1a\u53c2\u4e0e\u8005\u3002<\/p>\n

\u8fd9\u4e9b\u51fa\u7248\u7269\u8fd8\u5bf9 SCL \u7684\u80fd\u529b\u4ee5\u53ca\u5982\u4f55\u5728 SCL \u8bbe\u8ba1\u548c\u5236\u9020\u82af\u7247\u63d0\u4f9b\u4e86\u5f88\u591a\u89c1\u89e3\u3002<\/p>\n

\u8fd9\u4e9b\u8bba\u6587\u662f\uff1a1.SCL 180nm CMOS foundry: High reliability ASIC design for aerospace applications : H. S. Jatana and Nilesh M Desai, 2015, published by IEEE in 20152.From design to tape-out in SCL 180nm CMOS integrated circuit fabrication technology : Joydeep Basu (IIT Kharagpur), published by IETE Journal of education in 2019\u8fd9\u4e5f\u6307\u51fa\u4e86Tower semiconductors \u7684 180nm \u6280\u672f\u548c SCL \u4e4b\u95f4\u53ef\u80fd\u6709\u5f88\u591a\u5171\u540c\u70b9\u7684\u53ef\u80fd\u6027\u3002<\/p>\n

\u4f7f\u7528\u4e00\u65b9\u63d0\u4f9b\u7684\u5de5\u827a\u8bbe\u8ba1\u5957\u4ef6 (PDK) \u5b8c\u6210\u7684\u8bbe\u8ba1\u4e5f\u5e94\u8be5\u53ef\u4ee5\u5728\u53e6\u4e00\u65b9\u5236\u9020\u3002\u6362\u53e5\u8bdd\u8bf4\uff0cSCL \u5f88\u53ef\u80fd\u5728\u5176\u90e8\u5206\u6216\u5168\u90e8 180nm \u4ea7\u54c1\u4e2d\u4e0e Tower semiconductors\u5171\u4eab\u4e92\u64cd\u4f5c\u6027\u3002<\/p>\n

\u4e09\u3001SCL \u7684\u4ea7\u80fd\u5229\u7528\u7387\u548c\u4f18\u5316SCL \u7f51\u7ad9\u6709\u4e00\u4e2a\u77e5\u60c5\u6743 (Right To Information\uff1a<\/h2>\n

RTI ) \u9875\u9762\uff0c\u5176\u4e2d\u5305\u542b\u6709\u5173\u5404\u79cd\u4e8b\u9879\u7684\u4fe1\u606f\u2014\u2014\u7ec4\u7ec7\u7ed3\u6784\u3001\u51b3\u7b56\u8fc7\u7a0b\u3001\u9884\u7b97\uff0c\u751a\u81f3\u8fd8\u6709\u622a\u81f3 2022 \u5e74 3 \u6708 31 \u65e5\u7684\u5de5\u8d44\u5355\u4e0a\u7684\u5458\u5de5\u540d\u5355\u3002\u7136\u800c\uff0c\u201c\u5236\u9020\u8bbe\u65bd\u548c\u5176\u4ed6\u57fa\u7840\u8bbe\u65bd\u7684\u5e03\u5c40\u3001\u8bbe\u5907\u7ec6\u8282\u548c\u7167\u7247\u201d\u5728\u4fdd\u5bc6\u9879\u76ee\u6e05\u5355\u4e0b\u3002RTI \u9875\u9762\u5f53\u524d\u663e\u793a\u201c\u6b63\u5728\u6784\u5efa\u7684\u9875\u9762\u201d\uff0c\u5c3d\u7ba1\u67d0\u4e9b\u76f4\u63a5\u94fe\u63a5\u4ecd\u7136\u6709\u6548\u3002\u6676\u5706\u5382\u7684\u4ea7\u80fd\u901a\u5e38\u4ee5\u6bcf\u6708\u6676\u5706\u5f00\u5de5\u91cf (WSPM) \u6765\u8861\u91cf\uff0c\u5e76\u4e14\u6ca1\u6709\u5173\u4e8e SCL \u7684 200 \u6beb\u7c73\u6676\u5706\u5c3a\u5bf8 180 \u7eb3\u7c73\u5de5\u827a\u8282\u70b9\u6676\u5706\u5382\u751f\u4ea7\u7ebf\u53ef\u80fd\u7684 WSPM \u7684\u516c\u5f00\u4fe1\u606f\u3002\u9274\u4e8e\u8fc4\u4eca\u4e3a\u6b62\u82af\u7247\u8ba2\u5355\u4ec5\u9650\u4e8e\u5370\u5ea6\u7684\u4e00\u4e9b\u5b66\u672f\u3001\u7814\u7a76\u548c\u7a7a\u95f4\u5e94\u7528\u76ee\u7684\uff0c\u8fc7\u53bb\u591a\u5e74\u5b9e\u73b0\u7684 WSPM \u53ef\u80fd\u8fdc\u4f4e\u4e8e\u8be5\u8bbe\u65bd\u7406\u8bba\u4e0a\u5e94\u8be5\u80fd\u591f\u4ea4\u4ed8\u7684\u6c34\u5e73\u3002<\/p>\n

\u6839\u636e\u6280\u672f\u8282\u70b9\u548c\u5176\u4ed6\u56e0\u7d20\uff0c\u67d0\u4e2a WSPM \u6240\u9700\u7684\u786e\u5207\u8bbe\u5907\u6570\u91cf\u53ef\u80fd\u56e0\u5de5\u5382\u800c\u5f02\uff1b\u4f46\u662f\uff0c\u8fd9\u91cc\u5c1d\u8bd5\u6839\u636e\u516c\u5171\u9886\u57df\u4e2d\u53ef\u7528\u7684\u4fe1\u606f\u548c\u4e00\u4e9b\u5047\u8bbe\u8fdb\u884c\u8fd1\u4f3c\u8ba1\u7b97\u3002\u7528\u4e8e\u5149\u523b\u7684\u626b\u63cf\u4eea\/\u6b65\u8fdb\u5668\u901a\u5e38\u662f\u6700\u6602\u8d35\u7684\u3002\u5149\u523b\u662f\u6bcf\u4e2a\u201clevel\u201d\u5904\u7406\u7684\u5fc5\u5907\u6b65\u9aa4\uff0c\u56e0\u4e3a\u8fd9\u662f\u5c06\u8bbe\u8ba1\uff08\u9010\u7ea7\uff09\u4ece\u5149\u63a9\u6a21\u8f6c\u79fb\u5230\u7845\u6676\u5706\uff08\u9010\u4e2a\u6676\u5706\uff0c\u6210\u767e\u4e0a\u5343\uff09\u7684\u5730\u65b9\u3002\u8fd9\u91cc\u7684\u201clevel\u201d\u662f\u6307\u6709\u6e90\u533a\u3001\u6805\u6781\u3001\u6bcf\u4e2a\u6ce8\u5165\u3001\u63a5\u89e6\u3001\u6bcf\u4e2a\u91d1\u5c5e\u3001\u901a\u5b54\u7b49\u3002180 nm \u8282\u70b9\u901a\u5e38\u9700\u8981\u5927\u7ea6 25 \u4e2a\u63a9\u6a21\u5c42\u7ea7\u7684\u8bbe\u8ba1\u624d\u80fd\u8f6c\u79fb\uff1b\u786e\u5207\u7684\u6570\u5b57\u4f1a\u6839\u636e\u82af\u7247\u7684\u590d\u6742\u7a0b\u5ea6\u800c\u7565\u6709\u4e0d\u540c\u3002\u8bf7\u53c2\u89c1\u4e0b\u56fe\uff0c\u5176\u4e2d\u4ee5\u5149\u523b\u4e3a\u4e2d\u5fc3\uff0c\u5e76\u975e\u6240\u6709\u5176\u4ed6\u5173\u952e\u5de5\u827a\u6b65\u9aa4\u90fd\u9002\u7528\u4e8e\u6bcf\u4e2a\u7ea7\u522b\u3002<\/p>\n

\u56fe\u6e90\uff1a\u201c\u624b\u673a\u6280\u672f\u8d44\u8baf\u201d\u5fae\u4fe1\u516c\u4f17\u53f7\u7528\u4e8e\u5149\u523b\u7684\u626b\u63cf\u4eea\/\u6b65\u8fdb\u5668\u4e2d\u4f7f\u7528\u7684\u5149\u6e90\u53d6\u51b3\u4e8e\u6240\u9700\u7684\u5206\u8fa8\u7387\u3002\u5728 180nm \u6280\u672f\u7684\u60c5\u51b5\u4e0b\uff0c\u5177\u6709\u6700\u5c0f\u7279\u5f81\u5c3a\u5bf8\u7684\u6c34\u5e73\u5c06\u9700\u8981\u5177\u6709 KrF \u6fc0\u5149\uff08\u6ce2\u957f\u4e3a 248nm\uff0c\u5373 Deep\u7d2b\u5916\u7ebf\uff09\u4f5c\u4e3a\u5176\u6765\u6e90\uff0c\u800c\u50cf\u201cfat metals\u201d\u548c\u5927\u9762\u79ef\u6ce8\u5165\u8fd9\u6837\u7684\u6c34\u5e73\u53ef\u4ee5\u4f7f\u7528\u6210\u672c\u4f4e\u5f97\u591a\u7684 i-line (365 nm) \u6b65\u8fdb\u5668\u6765\u5b8c\u6210\u3002SCL \u4f7f\u7528\u7684\u626b\u63cf\u4eea\/\u6b65\u8fdb\u5668\u7684\u4fe1\u606f\u5e76\u672a\u76f4\u63a5\u5728 SCL \u7f51\u7ad9\u4e0a\u63d0\u4f9b\uff0c\u4f46\u5728\u201c 2016 \u5e74 2 \u6708 4 \u65e5\u5728 SCL \u4e3e\u884c\u7684\u6295\u6807\u524d\u4f1a\u8bae\u671f\u95f4\u5411\u6f5c\u5728\u6295\u6807\u4eba\u7684\u8be2\u95ee\u63d0\u4f9b\u7684\u6f84\u6e05\u8bb0\u5f55\u201d\u4e2d\u63d0\u4f9b\u3002<\/p>\n

ISRO\u6f84\u6e05\u8bf4\u201c SCL \u6709 NSR-S204B \u5c3c\u5eb7\u626b\u63cf\u4eea\u548c NSR-2205i14E2 \u6b65\u8fdb\u5668\u201d\u3002\u6839\u636e\u5c3c\u5eb7\u7684\u7f51\u7ad9\uff0cNSR-S204B \u662f\u4e00\u6b3e\u57fa\u4e8e KrF \u7684\u626b\u63cf\u4eea\uff0c\u4f46\u6b64\u5904\u672a\u63d0\u53ca\u541e\u5410\u91cf\u503c\u3002\u50cf\u8fd9\u6837\u7684\u7f51\u7ad9\u548c\u8fd9\u6837\u7684\u7f51\u7ad9\u90fd\u5f15\u7528\u4e86\u6bcf\u5c0f\u65f6 120 \u4e2a\u6676\u5706 (WPH) \u7684\u6570\u5b57\u4f5c\u4e3a\u5176\u6807\u51c6\u541e\u5410\u91cf\u3002NSR-2205i14E2 \u662f i-line \u6b65\u8fdb\u5668\uff0c\u5176\u6570\u636e\u8868\u7ed9\u51fa\u7684\u541e\u5410\u91cf\u6570\u4e3a 103 WPH\u3002\u5728\u751f\u4ea7\u7ebf\u4e0a\u8fd0\u884c\u65f6\uff0c\u6211\u4eec\u8fd8\u9700\u8981\u8003\u8651\u672c\u6587\u6240\u8ff0\u7684\u201c\u6574\u4f53\u8bbe\u5907\u6548\u7387\u201d\uff08OEE\uff09\uff08\u4e0b\u9762\u7684\u6458\u8981\u56fe\uff09\u3002\u56fe\u6e90\uff1a\u201c\u624b\u673a\u6280\u672f\u8d44\u8baf\u201d\u5fae\u4fe1\u516c\u4f17\u53f7\u5982\u672c\u6587\u6240\u8ff0\uff0c\u76ee\u6807\u901a\u5e38\u662f\u5b9e\u73b0 60% \u6216\u66f4\u9ad8\u7684 OEE\u3002<\/p>\n

\u5047\u8bbe\u5e73\u5747\u6bcf\u6708 30 \u5929\uff0c\u603b\u541e\u5410\u91cf\u53ef\u4ee5\u662f 720 \u5c0f\u65f6 X (120 wph + 103 wph) X 60%\uff0c\u5373 96,336 \u6b21\u5168\u6676\u5706\u5149\u523b\u66dd\u5149\u3002\u9664\u4ee5 25\uff0c\u8fd9\u662f 180nm \u82af\u7247\uff08\u8bbe\u8ba1\uff09\u4e2d\u7684\u5e73\u5747\u63a9\u6a21\u5c42\u6570\uff0c\u6211\u4eec\u5f97\u5230\u6bcf\u6708 3,853 \u4e2a\u6676\u5706\u7684\u5904\u7406\u80fd\u529b\u3002\u4e3a\u4f7f\u6676\u5706\u5382\u7684 180nm \u751f\u4ea7\u7ebf\u8fbe\u5230\u8be5\u4ea7\u80fd\uff0c\u5fc5\u987b\u6709\u8db3\u591f\u6570\u91cf\u7684\u8bbe\u5907\u7528\u4e8e\u5176\u4ed6\u5de5\u827a\u6b65\u9aa4\uff08\u8680\u523b\u3001\u6ce8\u5165\u3001\u6269\u6563\u3001\u6c89\u79ef\u3001\u751f\u957f\u3001\u5e73\u9762\u5316\u3001\u8ba1\u91cf\u7b49\uff09\u548c\u5177\u6709\u826f\u597d\u6574\u4f53\u6548\u7387\u7684\u81ea\u52a8\u5316\u3002\u5982\u524d\u6240\u8ff0\uff0c\u4e0e KrF \u626b\u63cf\u4eea\u76f8\u6bd4\uff0c\u8fd9\u4e9b\u8bbe\u5907\u7684\u6210\u672c\u53ef\u80fd\u8981\u4f4e\u5f97\u591a\u3002\u6b64\u5916\uff0c\u5728 25 \u4e2a\u63a9\u6a21\u5c42\u7ea7\u4e2d\uff0c\u91cd\u8981\u7684\u662f\u8981\u9002\u5f53\u5730\u4f7f\u7528 KrF \u626b\u63cf\u4eea\u6765\u5904\u7406\u9700\u8981\u66f4\u9ad8\u5206\u8fa8\u7387\u7684\u5173\u952e\u5c42\u7ea7\uff0c\u5e76\u4e3a\u5176\u4ed6\u5c42\u7ea7\u4f7f\u7528 i-line \u6b65\u8fdb\u5668\u3002<\/p>\n

\u6362\u53e5\u8bdd\u8bf4\uff0c\u4f18\u5316\u5de5\u5177\u7684\u8d1f\u8f7d\u5f88\u91cd\u8981\u3002\u6709\u8da3\u7684\u662f\uff0cISRO \u7f51\u7ad9\u4e0a\u4ecd\u6709\u4e00\u4efd 2019 \u5e74\u7684\u201c\u610f\u5411\u4e66\u201d\u8868\u793a\uff1a\u201c\u534a\u5bfc\u4f53\u5b9e\u9a8c\u5ba4 (SCL) ……\u62e5\u6709 8 \u82f1\u5bf8 CMOS \u6676\u5706\u5236\u9020\u8bbe\u65bd\uff0c\u5305\u62ec 67 \u4e2a\u5904\u7406\u3001\u8ba1\u91cf\u3001\u7535\u6c14\u6d4b\u8bd5\u3001\u4ea7\u91cf\u548c\u5176\u4ed6\u8f85\u52a9\u8bbe\u5907\u3002SCL \u5e0c\u671b\u5b9e\u73b0\u6676\u5706\u5382\u751f\u4ea7\u7ebf\u7684\u81ea\u52a8\u5316\uff0c\u5e76\u901a\u8fc7\u6b64\u610f\u5411\u4e66\u9080\u8bf7\u6709\u5174\u8da3\u548c\u6709\u80fd\u529b\u7684\u5404\u65b9\u63d0\u4ea4\u4ed6\u4eec\u7684\u9879\u76ee\u63d0\u6848\u201d\u3002\u8fd9\u65b9\u9762\u7684\u8fdb\u4e00\u6b65\u53d1\u5c55\u5c1a\u4e0d\u6e05\u695a\u3002<\/p>\n

\u56db\u3001\u89e3\u51b3\u4e00\u4e9b\u7ecf\u5e38\u88ab\u89c6\u4e3a\u6311\u6218\u7684\u56e0\u7d20\u672c\u8282\u6db5\u76d6\u4e86\u6211\u542c\u5230\u6216\u8bfb\u5230\u7684\u4e00\u4e9b\u8bba\u70b9\uff0c\u5b83\u4eec\u5bf9 SCL \u7684\u6f5c<\/h2>\n

\u5728\u590d\u5174\u63d0\u51fa\u4e86\u6311\u6218\u2014\u2014\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\u4e5f\u7ed9\u51fa\u4e86\u5efa\u8bae\u3002a) \u73b0\u6709\u8bbe\u5907\u662f\u5426\u592a\u65e7\u4e14\u63a5\u8fd1\u4f7f\u7528\u5bff\u547d\uff1fASML \u662f\u9886\u5148\u7684\u6676\u5706\u5382\u8bbe\u5907\u5236\u9020\u5546\u4e4b\u4e00\uff0c\u5728\u5176\u7f51\u7ad9\u4e0a\u6709\u4e00\u4e2a\u6807\u9898\u4e3a\u201c\u5ef6\u957f\u4ea7\u54c1\u5bff\u547d\u201d\u7684\u90e8\u5206\uff0c\u4e0a\u9762\u5199\u7740\u201c\u7ef4\u62a4\u826f\u597d\u7684 ASML \u5149\u523b\u7cfb\u7edf\u53ef\u4ee5\u6301\u7eed\u6570\u5341\u5e74\u2014\u2014\u6211\u4eec\u4ea4\u4ed8\u7684\u51e0\u4e4e\u6240\u6709\u7cfb\u7edf\u4ecd\u5728\u4f7f\u7528\u5ba2\u6237\u6676\u5706\u5382\u201d\u2014\u2014\u8fd9\u4e0d\u4ec5\u9002\u7528\u4e8e ASML \u5236\u9020\u7684\u5149\u523b\u8bbe\u5907\uff0c\u4e5f\u9002\u7528\u4e8e\u5176\u4ed6\u8bbe\u5907\u5236\u9020\u5546\u4ee5\u53ca\u5927\u591a\u6570\u5176\u4ed6\u5173\u952e\u6676\u5706\u5382\u8bbe\u5907\u3002\u4e8b\u5b9e\u4e0a\uff0c\u6839\u636e\u65e5\u7ecf\u4e9a\u6d324 \u6708\u4efd\u7684\u4e00\u4efd\u62a5\u544a\uff0c\u201c\u8fc7\u53bb\u4e24\u5e74\uff0c\u7531\u4e8e\u9700\u6c42\u65fa\u76db\uff0c\u4e8c\u624b\u82af\u7247\u5236\u9020\u673a\u7684\u4ef7\u683c\u98d9\u5347\u201d\u3002\u4e16\u754c\u5404\u5730\u7684\u6676\u5706\u5382\u5c06\u70ed\u8877\u4e8e\u6700\u5927\u9650\u5ea6\u5730\u5229\u7528\u73b0\u6709\u8bbe\u5907\uff0c\u5305\u62ec\u5728\u9700\u8981\u65f6\u8fdb\u884c\u7ffb\u65b0\u3002<\/p>\n

b) 180nm \u8fd8\u6709\u5e02\u573a\u5417\uff1f\u8fd9\u4e0d\u662f\u201c\u8fc7\u65f6\u201d\u7684\u6280\u672f\u5417\uff1f\u4ee5\u4e0b\u662f\u4e00\u4e9b\u6709\u8da3\u7684\u8bfb\u7269\u2014\u2014\u6839\u636eComputerWorld\u6700\u8fd1\u7684\u4e00\u7bc7\u6587\u7ae0\uff0c\u201c\u82af\u7247\u5bb9\u91cf\u7684\u7f3a\u4e4f\u4e3b\u8981\u662f\u9488\u5bf9\u57fa\u4e8e\u4f20\u7edf\u903b\u8f91\u82af\u7247\u7684\u65e7\u534a\u5bfc\u4f53\uff0c\u5305\u62ec\u4f8b\u5982 40nm\u300190nm\u3001150nm\u3001180nm \u548c 250nm \u8282\u70b9\u201d\u3002SemiEngineering\u7684\u8fd9\u7bc7\u7a0d\u65e9\u4e00\u4e9b\u7684\u6587\u7ae0\u4e5f\u53cd\u6620\u4e86\u8fd9\u4e00\u70b9\u3002\u5728\u4eca\u5e74\u7684\u53e6\u4e00\u4efd\u62a5\u544a\u4e2d\u79f0\u201c200 \u6beb\u7c73\u77ed\u7f3a\u53ef\u80fd\u4f1a\u6301\u7eed\u591a\u5e74\u201d\u3002\u6f84\u6e05\u4e00\u4e0b\uff0c\u201c200mm \u6676\u5706\u5382\u91c7\u7528\u6210\u719f\u7684\u5de5\u827a\u6280\u672f\u5236\u9020\u8bbe\u5907\uff0c\u4ece 6\u00b5m \u5230 110nm \u8282\u70b9\u201d\uff08\u56e0\u6b64\u5305\u62ec 180nm\uff09\uff0c\u6839\u636eSEMI\uff0c200mm \u6676\u5706\u5382\u7684\u6574\u4f53\u4ea7\u80fd\u7ea6\u4e3a\u6bcf\u6708 600 \u4e07\u7247\u6676\u5706\u3002<\/p>\n

c) SCL \u80fd\u5426\u5360\u9886\u90e8\u5206\u5e02\u573a\uff1f\u5b83\u6709\u826f\u597d\u7684\u4e1a\u52a1\u6d41\u7a0b\/\u8ba1\u5212\u5417\uff1f\u4e0e\u5168\u7403\u4ea7\u80fd\u76f8\u6bd4\uff0c\u6bcf\u6708 4,000 \u7247\u6676\u5706\u6216\u5927\u7ea6 4-5 \u5e74\u5185\u8d85\u8fc7 20 \u4e07\u7247\u6676\u5706\u662f\u4e00\u4e2a\u975e\u5e38\u5c0f\u7684\u6570\u5b57\u3002\u7136\u800c\uff0c\u6bcf\u4e2a\u6676\u5706\u90fd\u4f1a\u6709\u5f88\u591a\u82af\u7247\uff08\u591a\u5c11\u53d6\u51b3\u4e8e\u5355\u4e2a\u82af\u7247\u7684\u5927\u5c0f\uff0c\u672c\u7cfb\u5217\u7b2c 2 \u90e8\u5206\u4e2d\u7684\u793a\u4f8b\uff09\uff0c\u8fd9\u4e2a\u6570\u91cf\u53ef\u80fd\u80fd\u591f\u6ee1\u8db3\u5370\u5ea6\u56fd\u5185\u5728\u53ef\u5236\u9020\u7c7b\u522b\u4e2d\u7684\u5927\u91cf\u9700\u6c42\u91c7\u7528180nm\u6280\u672f\u3002\u76ee\u6807\u8fd8\u5e94\u8be5\u662f\u5c1d\u8bd5\u83b7\u5f97\u4e00\u4e9b\u51fa\u53e3\u2014\u2014\u201c\u5370\u5ea6\u5236\u9020\uff0c\u4e16\u754c\u5236\u9020\u201d\u3002<\/p>\n

\u4e94\u3001\u81f3\u5c11\u4e09\u4e2a\u56e0\u7d20\u5c06\u662f<\/h2>\n

\u8fd9\u9879\u5de5\u4f5c\u7684\u5173\u952e\u9996\u5148\u662f\u786e\u5b9a\u53ef\u4ee5\u5728 SCL \u6279\u91cf\u751f\u4ea7\u7684\u4ea7\u54c1\u3002\u4e8c\u662f\u5fae\u8c03SCL\u7684\u4e1a\u52a1\u8ba1\u5212\u548c\u8fd0\u8425\u6548\u7387\uff0c\u4f7f\u5176\u5728\u51e0\u5e74\u5185\u5b9e\u73b0\u76c8\u5229\u3002\u7b2c\u4e09\u662f\u6709\u4e00\u4e2a\u6709\u5438\u5f15\u529b\u7684\u4e1a\u52a1\u6d41\u7a0b\u80fd\u591f\u5339\u914d\u5ba2\u6237\u7684\u671f\u671b\u548c\u6ee1\u610f\u5ea6\u3002\u4f8b\u5982\uff0c\u6bcf\u4e00\u6b65\u7e41\u7410\u7684\u62db\u6807\u8fc7\u7a0b\uff08\u4f8b\u5982\u4ece\u8bbe\u8ba1\u4e2d\u5236\u9020\u5149\u63a9\u6a21\uff09\u53ef\u80fd\u5fc5\u987b\u7531\u9884\u5b9a\u7684\u4f9b\u5e94\u5546\u4ee3\u66ff\u3002\u7b2c\u56db\u662fSCL \u771f\u7684\u9700\u8981 500-600 \u540d\u5458\u5de5\u5417\uff1f\u8fd9\u4e48\u591a\u5458\u5de5\u548c\u524d\u5458\u5de5\u7684\u5de5\u8d44\u548c\u517b\u8001\u91d1\uff0c\u4f1a\u4e0d\u4f1a\u8ba9SCL\u96be\u4ee5\u76c8\u5229\uff1f\u53ea\u6709\u57fa\u4e8e\u5bf9\u5f53\u524d\u5458\u5de5\u89d2\u8272\u548c\u6280\u80fd\u7ec4\u5408\u7684\u8be6\u7ec6\u5206\u6790\uff0c\u624d\u80fd\u83b7\u5f97\u66f4\u51c6\u786e\u7684\u7b54\u6848\uff0c\u4f46\u8fd9\u91cc\u6709\u4e00\u4e9b\u5feb\u901f\u7684\u60f3\u6cd5\u3002\u4e3a\u4e86\u4e89\u8bba\uff0c\u8ba9\u6211\u4eec\u5047\u8bbe\u201c\u5458\u5de5\u4eba\u6570\u8d85\u8fc7\u4e86\u51cf\u5c11\u8fd0\u8425\u8d39\u7528\u7684\u7406\u60f3\u4eba\u6570\u201d\u2014\u2014\u9274\u4e8e SCL \u73b0\u5728\u5904\u4e8e MEITY \u4e4b\u4e0b\uff0c\u5e94\u8be5\u53ef\u4ee5\u5c06\u90a3\u4e9b\u5bf9\u6676\u5706\u5382\u4e0d\u611f\u5174\u8da3\u7684\u4eba\u91cd\u65b0\u5206\u914d\u5230\u5176\u4ed6\u529e\u516c\u5ba4\u3002<\/p>\n

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\u6240\u4ee5\uff0cSCL \u5728 Mohali \u7684\u68d5\u5730\u534a\u5bfc\u4f53\u82af\u7247\u5236\u9020\u8bbe\u65bd\u662f\u4e00\u9879\u8d44\u4ea7\uff0c\u5728\u6709\u80fd\u529b\u7684\u9886\u5bfc\u548c\u9002\u5f53\u7684\u5546\u4e1a\u8ba1\u5212\u4e0b\uff0c\u53ef\u4ee5\u4ee5\u4e0e\u5176\u8fd0\u8425\u80fd\u529b\u76f8\u79f0\u7684\u66f4\u9ad8\u4ea7\u80fd\u8fd0\u884c\u3002\u8fd9\u4e5f\u5c06\u52a0\u5f3a\u548c\u91cd\u7533\u5370\u5ea6\u5bf9\u201c\u4e0b\u4e00\u6ce2\u5546\u4e1a\u6676\u5706\u5382\u201d\u7684\u51c6\u5907\u3002\u5bf9\u5370\u5ea6\u653f\u5e9c\u800c\u8a00\uff0c\u4ed6\u4eec\u5df2\u7ecf\u5ba3\u5e03\u4e86\u5c06 SCL \u5546\u4e1a\u5316\u7684\u76ee\u6807\u3002\u73b0\u5728\uff0c\u5370\u5ea6\u5546\u4e1a\u516c\u53f8\u5e94\u8be5\u633a\u8eab\u800c\u51fa\uff0c\u901a\u8fc7\u5408\u8d44\u4f01\u4e1a\u53d6\u5f97\u6210\u529f\uff0c\u65e0\u6676\u5706\u5382\u516c\u53f8\uff08\u73b0\u6709\u6216\u5373\u5c06\u6210\u7acb\u7684\uff09\u5e94\u8be5\u62ff\u51fa\u66f4\u591a\u5177\u6709\u5e02\u573a\u4ef7\u503c\u7684\u4ea7\u54c1\uff0c\u53ef\u4ee5\u5728 SCL \u5927\u6279\u91cf\u5236\u9020\u3002<\/p>\n

\u672c\u6587\u8f6c\u8f7d\u81ea\u201c\u5347\u7ea7\u6280\u672f\u54a8\u8be2\u201d\u5fae\u4fe1\u516c\u4f17\u53f72022\u5e747\u670812\u65e5\u6587\u7ae0\uff0c\u539f\u6807\u9898\u4e3a\u300a\u5370\u5ea6\u552f\u4e00\u7684\u6676\u5706\u5382\uff0c\u4ec0\u4e48\u6c34\u5e73\uff1f\u300b\uff0c\u539f\u6587\u7f16\u8bd1\u81easwarajyamag\u7f51\u7ad92022\u5e747\u670810\u65e5\u6587\u7ae0\uff0c\u539f\u6807\u9898\u4e3aRamping Up India\u2019s First Fab To Higher Capacity\uff0c\u539f\u6587\u7f51\u5740\u4e3ahttps:\/\/swarajyamag.com\/tech\/rise-part-1-ramping-indias-first-fab-to-higher-capacity<\/a>\u672c\u671f\u7f16\u8f91\uff1a\u5218\u6d3e \u7a46\u794e\u74a0<\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

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